Title :
Crystallization behavior of amorphous terfenol-D thin films
Author :
Loveless, M. ; Guruswamy, S. ; Shield, J.E.
Author_Institution :
Dept. of Metall. Eng., Utah Univ., Salt Lake City, UT, USA
fDate :
9/1/1997 12:00:00 AM
Abstract :
The annealing behavior of amorphous terfenol-D thin films is examined in this work. Amorphous thin films were prepared by DC magnetron sputter deposition from alloy targets. Differential scanning calorimetry of these films was performed in the temperature range 100-800°C. Based on DSC data annealing experiments were performed at 400, 550, 575, 600 and 650°C. X-ray diffraction shows RFe2 phase is formed when samples are annealed at 575-600°C. Other phases observed are Fe and rare earth oxide
Keywords :
X-ray diffraction; amorphous magnetic materials; annealing; crystallisation; dysprosium alloys; iron alloys; magnetic thin films; sputtered coatings; terbium alloys; thermal analysis; 100 to 800 degC; DC magnetron sputter deposition; TbDyFe; X-ray diffraction; amorphous terfenol-D thin films; annealing; differential scanning calorimetry; Amorphous magnetic materials; Amorphous materials; Annealing; Calorimetry; Crystallization; Iron; Sputtering; Temperature distribution; Transistors; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
