Title :
An integrated micropermeameter for soft magnetic microstructures measurements
Author :
Fayard, E. ; Albertini, J.B. ; Dominiak, M. ; Renaux, Ph ; Joisten, H.
Author_Institution :
CEA, Centre d´´Etudes Nucleaires de Grenoble, France
fDate :
9/1/1997 12:00:00 AM
Abstract :
A prototype of integrated micropermeameter has been achieved, using the batch process on silicon wafers developed for the fabrication of magnetic heads for helical scan recorders. Measuring the inductance of the integrated solenoids as a function of the frequency gives information on the effective permeability of the magnetic microstructure. This component can be used as a local magnetic material characterization tool, it can also be used as an inductive passive component with possible adjustment of its frequency range by the demagnetizing factor
Keywords :
inductance; magnetic permeability measurement; soft magnetic materials; solenoids; batch process; demagnetizing factor; fabrication; helical scan recorder; inductance; integrated micropermeameter; magnetic head; passive component; silicon wafer; soft magnetic microstructure measurement; solenoid; Fabrication; Frequency measurement; Inductance measurement; Magnetic heads; Magnetic materials; Micromagnetics; Permeability measurement; Prototypes; Silicon; Solenoids;
Journal_Title :
Magnetics, IEEE Transactions on
