DocumentCode :
1512450
Title :
Deflection characteristics of a trapezoidal multilayer in-plane bending piezoelectric actuator
Author :
Wang, Zhihong ; Zhu, Weiguang ; Zhao, Changlei ; Yao, Xi
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
Volume :
48
Issue :
4
fYear :
2001
fDate :
7/1/2001 12:00:00 AM
Firstpage :
1103
Lastpage :
1110
Abstract :
A novel multilayer split-morph actuator has been designed and fabricated using the thick film screen-printing technology. Deflection characteristics of the split-morph actuator have been investigated by theoretical analysis and experimental measurement. The results indicate that the tip displacement is inversely proportional to the thickness of each piezoelectric layer, but is independent of the number of layers and the total thickness of the actuator. The displacement/voltage sensitivity of the trapezoidal actuator is larger than that of the rectangular design, assuming both have the same width of clamped end and the same thickness of the piezoelectric layers. The maximum displacement/voltage sensitivity of 0.157 /spl mu/m/V was obtained with a split-morph actuator with 30-/spl mu/m thick layers. The proposed actuator is a promising candidate for the secondary fine-tuning actuator of a dual stage head-positioning servo system in high density hard disk drives.
Keywords :
bending; disc drives; multilayers; piezoelectric actuators; piezoelectric thin films; sensitivity; 30 micron; actuator fabrication; deflection characteristics; displacement/voltage sensitivity; driving voltage characteristics; dual stage head-positioning servo system; high density hard disk drives; in-plane bending piezoelectric actuator; multilayer split-morph actuator; piezoelectric layer thickness; secondary fine-tuning actuator; thick film screen printing technology; tip displacement; trapezoidal multilayer piezoelectric actuator; Hard disks; Nonhomogeneous media; Optical control; Optical films; Optical sensors; Piezoelectric actuators; Resonance; Resonant frequency; Servomechanisms; Voltage;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/58.935729
Filename :
935729
Link To Document :
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