Output Characteristics of Q-switched Solid-State Lasers Using Intracavity MEMS Micromirrors

The output behavior of a Nd:YAG solid-state laser actively Q-switched by a MEMS scanning micromirror is presented. Using a gold-coated micromirror, maximum average output powers of 50 mW and pulse durations as short as 120 ns were obtained with a dual beam output. This output pattern originates from a pulse emission when the micromirror is at an angle from the cavity axis. The temporal and spatial behavior of this laser was experimentally characterized and then modeled using a numerical simulation of the laser rate equations. Finally, prospects for power scaling this MEMS-based Q-switch technique are demonstrated using a dielectric-coated micromirror, which led to average output powers of up to 650 mW and pulse energies above 40 μJ.