DocumentCode
1513610
Title
FBAR Sensor Array for in Liquid Operation
Author
Enlund, Johannes ; Martin, David M. ; Yantchev, Ventsislav ; Katardjiev, Ilia
Author_Institution
Dept. of Solid State Electron., Uppsala Univ., Uppsala, Sweden
Volume
10
Issue
12
fYear
2010
Firstpage
1903
Lastpage
1904
Abstract
This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.
Keywords
acoustic resonators; bulk acoustic wave devices; sensor arrays; FBAR sensor array; Q-degradation; crosstalk; liquid operation; thickness shear mode thin-film bulk acoustic resonator; Acoustic devices; Acoustic sensors; Acoustic waves; Biosensors; Conductivity; Crosstalk; Electrodes; Film bulk acoustic resonators; Sensor arrays; Thin film sensors; Aluminumnitride; biomedical transducers; bulk acoustic wave (BAW) devices; crosstalk;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2010.2051944
Filename
5483127
Link To Document