DocumentCode
1514443
Title
Galvanic cell formation: a review of approaches to silicon etching for sensor fabrication
Author
Kelly, John J. ; Xia, Xinghua H. ; Ashruf, Colin M A ; French, Paddy J.
Volume
1
Issue
2
fYear
2001
fDate
8/1/2001 12:00:00 AM
Firstpage
127
Keywords
Anisotropic magnetoresistance; Biomembranes; Etching; Fabrication; Galvanizing; Passivation; Sensor phenomena and characterization; Silicon; Solids; Surface morphology;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2001.936930
Filename
936930
Link To Document