DocumentCode
1514455
Title
Nanometer-scale force sensing with MEMS devices
Author
Kenny, Thomas
Volume
1
Issue
2
fYear
2001
fDate
8/1/2001 12:00:00 AM
Firstpage
148
Keywords
Biosensors; Chemical and biological sensors; Force sensors; Instruments; Magnetic sensors; Microelectromechanical devices; Micromechanical devices; Nanoscale devices; Optical device fabrication; Optical sensors;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2001.936932
Filename
936932
Link To Document