Title :
Micromechanical Magnetic Sensor Based on Cylindrical Ferromagnets
Author :
Du, Guangtao ; Chen, Xiangdong ; Lin, Qibin
Author_Institution :
Sch. of Inf. Sci. & Technol., Southwest Jiaotong Univ., Chengdu, China
Abstract :
In order to solve the problems of cantilever-based magnetic sensors and develop the simple and low-cost magnetic field sensors, novel sensors based on a cylindrical ferromagnet attached to a silicon diaphragm and piezoresistive membrane are proposed. The interaction between the magnetic field and the ferromagnet generates a deflection of the diaphragm, which changes the piezoresistance and unbalances a Wheatstone bridge. The sensitivity of the sensors is proportional to the permeability, supply voltage, and aspect ratio of the ferromagnet. These low-cost, low-power sensors are easily integrated with electronic circuits.
Keywords :
cantilevers; diaphragms; ferromagnetic materials; magnetic sensors; microsensors; silicon; Wheatstone bridge; cantilever-based magnetic sensors; cylindrical ferromagnets; electronic circuits; low-cost magnetic field sensors; low-cost sensors; low-power sensors; micromechanical magnetic sensor; piezoresistive membrane; silicon diaphragm; Frequency modulation; Magnetic fields; Magnetic sensors; Permeability; Sensitivity; Temperature sensors; Bearing steel; Ni; cylindrical ferromagnets; magnetic field sensors; permeability;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2011.2153195
