DocumentCode
1514776
Title
Two-pole micromachined bandpass filter at 150 ghz with 4% 3 db bandwidth
Author
Hajj, R. ; Chatras, Matthieu ; Blondy, Pierre ; Rigaudeau, L. ; Puech, J.
Author_Institution
CNRS, Univ. de Limoges, Limoges, France
Volume
46
Issue
12
fYear
2010
Firstpage
843
Lastpage
845
Abstract
A two-pole micromachined membrane supported bandpass filter at 150 GHz is presented for the first time. The silicon substrate is completely etched beneath the excitation and the resonating systems. Experimental results are presented. 4.5 dB insertion losses at 149.4 GHz are measured for a two-pole 4% 3 dB bandwidth filter. The measured unloaded quality factor is 230. 2.5D and 3D simulations were used and the measurement results match electromagnetic simulations very well.
Keywords
band-pass filters; millimetre wave filters; frequency 149.4 GHz; frequency 150 GHz; loss 4.5 dB; two-pole micromachined membrane;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2010.0809
Filename
5483960
Link To Document