Two-pole micromachined bandpass filter at 150 ghz with 4% 3 db bandwidth

A two-pole micromachined membrane supported bandpass filter at 150 GHz is presented for the first time. The silicon substrate is completely etched beneath the excitation and the resonating systems. Experimental results are presented. 4.5 dB insertion losses at 149.4 GHz are measured for a two-pole 4% 3 dB bandwidth filter. The measured unloaded quality factor is 230. 2.5D and 3D simulations were used and the measurement results match electromagnetic simulations very well.