DocumentCode :
1514792
Title :
Photonic Crystal Fiber Tip Sensor for High-Temperature Measurement
Author :
Park, Bryan ; Provine, J. ; Jung, Il Woong ; Howe, Roger T. ; Solgaard, XOlav
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Volume :
11
Issue :
11
fYear :
2011
Firstpage :
2643
Lastpage :
2648
Abstract :
We demonstrate a temperature sensor consisting of a 2-D, Silicon (Si), Photonic Crystal (PC) attached to the facet of a standard single-mode optical fiber. The 2-D PC sensors are fabricated on standard Si wafers, using a single mask and a combination of isotropic and anisotropic etching, and microassembled onto the facets of the optical fibers by Si-welding. The temperature of the Si-PC sensor is monitored by measuring its reflectance spectrum in the 1250 to 1650 nm wavelength range. The measured reflectivity peak shift is 0.11 nm°C in the 100°C to 700°C temperature range. The observed spectral shift and temperature sensitivity are significantly higher than high-temperature fiber Bragg grating sensors, and comparable to long-period fiber gratings sensors. The high sensitivity, combined with compactness and robust structure, give these sensors strong potential for use in harsh environments.
Keywords :
elemental semiconductors; etching; fibre optic sensors; holey fibres; microassembling; photonic crystals; silicon; temperature measurement; temperature sensors; Si; anisotropic etching; high-temperature fiber Bragg grating sensor; high-temperature measurement; isotropic etching; long-period fiber gratings sensor; microassembling; observed spectral shift; photonic crystal fiber tip sensor; reflectance spectrum measurement; reflectivity peak shift measurement; standard single-mode optical facet fiber; temperature 100 degC to 700 degC; temperature sensitivity; temperature sensor; wavelength 1250 nm to 1650 nm; Optical fiber sensors; Optical fibers; Refractive index; Sensitivity; Silicon; Temperature measurement; Temperature sensors; Fiber tip sensor; GOPHER process; high-temperature measurement; photonic crystal;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2011.2153844
Filename :
5766010
Link To Document :
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