DocumentCode
1517253
Title
International Symposium on Semiconductor Manufacturing
Volume
14
Issue
3
fYear
2001
fDate
8/1/2001 12:00:00 AM
Abstract
The individual sessions of the conference covered a wide variety of topics, including fab design, strategy and management, manufacturing control and execution, defect reduction and yield enhancement, ultra clean technology, process and metrology equipment, process and materials optimization, and environmental issues
Keywords
semiconductor technology; environmental factors; fab management; semiconductor manufacturing; ultra-clean technology; Electronics industry; Manufacturing industries; Manufacturing processes; Meetings; Metallization; Optimized production technology; Semiconductor device manufacture; Semiconductor materials; Technological innovation; Technology management;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/66.939808
Filename
939808
Link To Document