DocumentCode
1518615
Title
Isopropyl Alcohol Sensors of CuO Nanotubes by Thermal Oxidation of Copper Films on Glass
Author
Hsueh, Han-Ting ; Chang, Shoou-Jinn ; Hung, Fei-Yi ; Weng, Wen-Yin ; Chang, S.P. ; Hsueh, T.J. ; Hsu, Cheng-Liang ; Dai, Bau-Tong
Volume
11
Issue
12
fYear
2011
Firstpage
3276
Lastpage
3282
Abstract
The growth of CuO nanotubes on Cu/CuO/glass templates is reported. It was found that porous structures were formed at the interface between sputtered CuO film and Cu layer after annealing. The average length of the nanotubes and thickness of the porous structure both increased monotonically as we increased the initial thickness of the copper film. The CuO nanotubes were used to fabricate isopropyl alcohol (IPA) sensors. With a 5-V applied bias, the current became smaller as the IPA was injected into the sealed test chamber. Furthermore, the measured response was larger for the sensors with longer CuO nanotubes.
Keywords
annealing; chemical sensors; copper compounds; glass; nanoporous materials; nanotubes; oxidation; thin films; CuO; IPA sensors; annealing; glass; isopropyl alcohol sensors; nanotubes; porous structures; sealed test chamber; thermal oxidation; Copper; Current measurement; Films; Glass; Nanotubes; Sensors; Substrates; CuO; isopropyl alcohol (IPA); nanotubes;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2011.2155645
Filename
5770164
Link To Document