• DocumentCode
    1518615
  • Title

    Isopropyl Alcohol Sensors of CuO Nanotubes by Thermal Oxidation of Copper Films on Glass

  • Author

    Hsueh, Han-Ting ; Chang, Shoou-Jinn ; Hung, Fei-Yi ; Weng, Wen-Yin ; Chang, S.P. ; Hsueh, T.J. ; Hsu, Cheng-Liang ; Dai, Bau-Tong

  • Volume
    11
  • Issue
    12
  • fYear
    2011
  • Firstpage
    3276
  • Lastpage
    3282
  • Abstract
    The growth of CuO nanotubes on Cu/CuO/glass templates is reported. It was found that porous structures were formed at the interface between sputtered CuO film and Cu layer after annealing. The average length of the nanotubes and thickness of the porous structure both increased monotonically as we increased the initial thickness of the copper film. The CuO nanotubes were used to fabricate isopropyl alcohol (IPA) sensors. With a 5-V applied bias, the current became smaller as the IPA was injected into the sealed test chamber. Furthermore, the measured response was larger for the sensors with longer CuO nanotubes.
  • Keywords
    annealing; chemical sensors; copper compounds; glass; nanoporous materials; nanotubes; oxidation; thin films; CuO; IPA sensors; annealing; glass; isopropyl alcohol sensors; nanotubes; porous structures; sealed test chamber; thermal oxidation; Copper; Current measurement; Films; Glass; Nanotubes; Sensors; Substrates; CuO; isopropyl alcohol (IPA); nanotubes;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2011.2155645
  • Filename
    5770164