• DocumentCode
    1519056
  • Title

    Fast Imaging Investigation on Pulsed Magnetron Discharge

  • Author

    Costin, Claudiu ; Tiron, Vasile ; Faustin, Jonathan ; Popa, Gheorghe

  • Author_Institution
    Fac. of Phys., Alexandru loan Cuza Univ., Iasi, Romania
  • Volume
    39
  • Issue
    11
  • fYear
    2011
  • Firstpage
    2482
  • Lastpage
    2483
  • Abstract
    A time-resolved fast imaging technique was applied for the investigation of both gas (Ar) and sputtered material (Al) excited species in a high-power short-pulse magnetron discharge.
  • Keywords
    aluminium; argon; glow discharges; magnetrons; plasma diagnostics; plasma materials processing; plasma sources; plasma-wall interactions; sputtering; surface treatment; Al; Ar; excited argon gas species; high power short pulse magnetron discharge; pulsed magnetron discharge; sputtered excited aluminium species; time resolved fast imaging technique; Argon; Atomic measurements; Discharges; Magnetic resonance imaging; Metals; Fast imaging; high-power impulse magnetron;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2011.2145005
  • Filename
    5770231
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1519056