Fully Integrated High-Isolation Low-Loss Digitally Controlled MEMS Filters

Author

Ma, Kaixue ; Jayasuriya, Rajanik Mark ; Siong, Desmond Rodney Lim Chin

Author_Institution

Satcom & Sensor Syst., ST Electron., Singapore, Singapore

Volume

58

Issue

7

fYear

2011

fDate

7/1/2011 12:00:00 AM

Firstpage

2690

Lastpage

2696

Abstract

In this paper, the design and packaging of fully integrated digitally controlled microelectromechanical system (MEMS) filters with low cost, high performance, and compact size are introduced. The four-channel switched filters operating in the frequency range of 11-20 GHz have been developed using MEMS technologies and four five-pole edge-coupled bandpass filters, which are modified from the traditional edge-coupled bandpass filter in the input and output feeders to achieve a better stopband performance. Microwave filters, MEMS circuits, and related packaging are investigated and demonstrated theoretically and experientially.

Keywords

band-pass filters; integrated circuit design; micromechanical devices; microwave filters; packaging; switched filters; MEMS circuit; design; five-pole edge-coupled bandpass filter; four-channel switched filter; frequency 11 GHz to 20 GHz; fully integrated digitally controlled microelectromechanical system filter; microwave filter; packaging; Band pass filters; Costs; Digital control; Digital filters; Frequency; Integrated circuit technology; Micromechanical devices; Microwave filters; Packaging; Size control; Bandpass filter; circuit and packaging codesign; digitally switched filters (SFs); microelectromechanical systems (MEMS); software-defined radio;

fLanguage

English

Journal_Title

Industrial Electronics, IEEE Transactions on

Publisher

ieee

ISSN

0278-0046

Type

jour

DOI

10.1109/TIE.2010.2053336

Filename

5491166