A novel MEMS pressure sensor fabricated on an optical fiber

Author

Abeysinghe, D.C. ; Dasgupta, S. ; Boyd, J.T. ; Jackson, H.E.

Author_Institution

Dept. of Phys., Cincinnati Univ., OH, USA

Volume

13

Issue

9

fYear

2001

Firstpage

993

Lastpage

995

Abstract

We describe the fabrication, and initial testing of a novel optically interrogated, microelectromechanical system (MEMS) pressure sensor in which the entire MEMS structure is fabricated directly on an optical fiber A new micromachining process for use on a flat fiber end face that includes photolithographic patterning, wet etching of a cavity, and anodic bonding of a silicon diaphragm is utilized. We have employed both 200- and 400-μm-diameter multimode optical fibers. A pressure sensor fabricated on an optical fiber has been tested displaying an approximately linear response to static pressure (0-80 psi). This sensor is expected to find application in situations where small size is advantageous and where dense arrays may be useful.

Keywords

etching; fibre optic sensors; micro-optics; micromachining; microsensors; optical fabrication; optical testing; photolithography; pressure sensors; 0 to 80 psi; 200 mum; 400 mum; MEMS pressure sensor; anodic bonding; cavity; dense arrays; fabrication; flat fiber end face; initial testing; linear response; micromachining process; multimode optical fibers; optical fiber; optically interrogated microelectromechanical system pressure sensor; photolithographic patterning; silicon diaphragm; small size; static pressure; wet etching; Microelectromechanical systems; Micromechanical devices; Optical device fabrication; Optical fiber sensors; Optical fiber testing; Optical fibers; Optical sensors; Sensor arrays; Sensor phenomena and characterization; System testing;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.942671

Filename

942671