DocumentCode
1522609
Title
Effect of polar groups on the electrical breakdown strength of plasma-polymerized films
Author
Nakano, Toshiki ; Fukuyama, Masao ; Hayashi, Hisaaki ; Ishii, Kazuki ; Ohki, Yoshimichi
Author_Institution
Dept. of Electr. Eng., Waseda Univ., Tokyo, Japan
Volume
25
Issue
6
fYear
1990
fDate
12/1/1990 12:00:00 AM
Firstpage
1085
Lastpage
1091
Abstract
The electrical breakdown of plasma polymer films was studied by applying rectangular voltage pulses. Experimental evidence indicates that the breakdown field increases after incorporation of fluorine atoms into the film when the pulse width is <5 μs. This is due to the scattering of electronic carriers caused by C-F bonds
Keywords
electric breakdown of solids; electric strength; polymer films; breakdown field; carbon-fluorine bonds; electrical breakdown strength; electronic carriers; plasma polymer films; polar groups; pulse width; rectangular voltage pulses; Breakdown voltage; Electric breakdown; Electric variables measurement; Plasma chemistry; Plasma measurements; Plasma properties; Polymer films; Pulse amplifiers; Pulse generation; Pulse measurements;
fLanguage
English
Journal_Title
Electrical Insulation, IEEE Transactions on
Publisher
ieee
ISSN
0018-9367
Type
jour
DOI
10.1109/14.64493
Filename
64493
Link To Document