A Half-Mode Substrate-Integrated-Waveguide Tunable Filter Using Packaged RF MEMS Switches

Author

Sekar, Vikram ; Entesari, Kamran

Author_Institution

RF Modeling Technol. Group, Peregrine Semicond., San Diego, CA, USA

Volume

22

Issue

7

fYear

2012

fDate

7/1/2012 12:00:00 AM

Firstpage

336

Lastpage

338

Abstract

A two-pole, half-mode substrate-integrated-waveguide (HMSIW) RF MEMS tunable filter with 28% tuning range around 1.4 GHz is presented. The filter occupies a total area of λ_g × 0.7λg @ 1.4 GHz and exhibits an insertion loss of 1.2-3.4 dB, return loss better than 11 dB and quality factor of 75-140 for all tuning states, while having excellent linearity. The filter maintains a constant absolute 1 dB bandwidth of 85 ±10 MHz over the filter tuning range. Circuit models for the tunable HMSIW resonator and a methodology for systematic filter design are also described in detail.

Keywords

Q-factor; circuit tuning; filters; integrated circuit modelling; integrated circuit packaging; microswitches; substrate integrated waveguides; HMSIW RF MEMS tunable filter; circuit model; filter tuning range; frequency 1.4 GHz; loss 1.2 dB to 3.4 dB; packaged RF MEMS switch; quality factor; systematic filter design; tunable HMSIW resonator; two-pole half-mode substrate-integrated-waveguide; Bandwidth; Micromechanical devices; Microswitches; Radio frequency; Resonant frequency; Substrates; Tuning; Half-mode substrate-integrated-waveguide (HMSIW); RF microelectromechanical systems (MEMS); tunable filter;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/LMWC.2012.2199976

Filename

6204205