• DocumentCode
    1524437
  • Title

    Variable frequency microwave curing of photosensitive polyimides

  • Author

    Famsworth, K.D. ; Manépalli, Rahul N. ; Bidstrup-Allen, Sue Ann ; Kohl, Paul A.

  • Author_Institution
    Sch. of Chem. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • Volume
    24
  • Issue
    3
  • fYear
    2001
  • fDate
    9/1/2001 12:00:00 AM
  • Firstpage
    474
  • Lastpage
    481
  • Abstract
    Variable frequency microwave (VFM) curing was investigated as a means of rapid curing of two photosensitive polyimides. The properties of two polymers, PI 2734 and Ultradel 7501, cured by convective heating and VFM curing were compared. The results of this study indicate that rapid VFM curing of these polymers is feasible. Complete imidization was possible. The most significant differences in properties between VFM and thermally cured films were in the electrical properties due to the slow evolution of chemical products
  • Keywords
    dielectric thin films; microwave heating; polymer films; PI 2734; Ultradel 7501; dielectric thin films; electrical properties; imidization; photosensitive polyimides; variable frequency microwave curing; Chemicals; Curing; Dielectric substrates; Electromagnetic heating; Frequency; Manufacturing; Optical films; Polyimides; Polymer films; Semiconductor films;
  • fLanguage
    English
  • Journal_Title
    Components and Packaging Technologies, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1521-3331
  • Type

    jour

  • DOI
    10.1109/6144.946496
  • Filename
    946496
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1524437