Title :
Comparison of capacitive and feedback-interferometric measurements on MEMS
Author :
Annovazzi-Lodi, Valerio ; Merlo, Sabina ; Norgia, Michele
Author_Institution :
Dipartimento di Elettronica, Pavia Univ., Italy
fDate :
9/1/2001 12:00:00 AM
Abstract :
In this paper, we consider a typical microelectromechanical structure consisting of a small mass suspended by four laminar springs, which can be forced to vibrate by electrical actuation, and represents the basic block of many accelerometers, gyros and resonators. Measurements of parameters, such as the actuation efficiency, the resonance frequency and the quality factor, have been performed for such devices by feedback interferometry, and the results are compared with data obtained by the standard capacitive method
Keywords :
Q-factor measurement; light interferometry; micromechanical devices; semiconductor device measurement; MEMS; accelerometers; actuation efficiency; capacitive measurements; electrical actuation; feedback-interferometric measurements; gyros; laminar springs; quality factor; resonance frequency; resonators; Accelerometers; Feedback; Frequency measurement; Interferometry; Measurement standards; Performance evaluation; Q factor; Resonance; Resonant frequency; Springs;
Journal_Title :
Microelectromechanical Systems, Journal of
