DocumentCode
1525179
Title
Comparison of capacitive and feedback-interferometric measurements on MEMS
Author
Annovazzi-Lodi, Valerio ; Merlo, Sabina ; Norgia, Michele
Author_Institution
Dipartimento di Elettronica, Pavia Univ., Italy
Volume
10
Issue
3
fYear
2001
fDate
9/1/2001 12:00:00 AM
Firstpage
327
Lastpage
335
Abstract
In this paper, we consider a typical microelectromechanical structure consisting of a small mass suspended by four laminar springs, which can be forced to vibrate by electrical actuation, and represents the basic block of many accelerometers, gyros and resonators. Measurements of parameters, such as the actuation efficiency, the resonance frequency and the quality factor, have been performed for such devices by feedback interferometry, and the results are compared with data obtained by the standard capacitive method
Keywords
Q-factor measurement; light interferometry; micromechanical devices; semiconductor device measurement; MEMS; accelerometers; actuation efficiency; capacitive measurements; electrical actuation; feedback-interferometric measurements; gyros; laminar springs; quality factor; resonance frequency; resonators; Accelerometers; Feedback; Frequency measurement; Interferometry; Measurement standards; Performance evaluation; Q factor; Resonance; Resonant frequency; Springs;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.946778
Filename
946778
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