An integrated simulator for coupled domain problems in MEMS

Author

Kirby, Robert M. ; Karniadakis, George Em ; Mikulchenko, Oleg ; Mayaram, Kartikeya

Author_Institution

Div. of Appl. Math., Brown Univ., Providence, RI, USA

Volume

10

Issue

3

fYear

2001

fDate

9/1/2001 12:00:00 AM

Firstpage

379

Lastpage

391

Abstract

An integrated circuit and microfluidic simulator is presented in this paper. It allows coupled simulation of flow, structure, thermal, and electrical domains. The overall architecture and various algorithms including the coupling of the circuit and microfluidic simulators are described. An application of the simulator is demonstrated for a controlled microliquid dosing system using detailed numerical models for the fluid field, a low-dimensional model for the flow sensor, and circuit elements for the electronic control. Unlike other simulators which employ mostly lumped models for the various components, we formulate here a methodology for distributed systems

Keywords

circuit simulation; digital simulation; flow simulation; microfluidics; micromechanical devices; numerical analysis; MEMS; controlled microliquid dosing system; coupled domain problem; distributed systems; electrical simulation; flow simulation; integrated circuit/microfluidic simulator; integrated simulator; low-dimensional model; numerical models; structure simulation; thermal simulation; Associate members; Biomembranes; Circuit simulation; Control system synthesis; Coupling circuits; Fluid flow control; Microfluidics; Micromechanical devices; Numerical models; Shape;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.946788

Filename

946788