Title :
Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz
Author :
Nordquist, Christopher D. ; Wanke, Michael C. ; Rowen, AdamM ; Arrington, Christian L. ; Grine, Albert D. ; Fuller, Charles T.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Single-mode TE10 rectangular waveguides operating near 3 THz have been demonstrated. The waveguides have internal dimensions of 75 μm × 37 μm (WR-0.3) and are fabricated using an additive gold electroplating process on a silicon substrate. The impact of photoresist removal holes was minimized by full-wave design of the hole and matching structures. Waveguides were measured at three frequencies from 2.56 to 3.11 THz and demonstrated loss as low as 1.3 dB/mm at 3.11 THz, corresponding to a loss per wavelength of 0.12 dB/λ. This paper summarizes the design, fabrication, and measurement of these micromachined waveguides operating near 3 THz.
Keywords :
electroplating; gold; integrated optics; micro-optics; micromachining; optical design techniques; optical fabrication; optical waveguides; photoresists; Au; Si; frequency 2.56 THz to 3.11 THz; full-wave design; gold electroplating process; optical design; optical fabrication; photoresist removal holes; silicon substrate; single-mode TE10 rectangular waveguide; surface metal micromachined rectangular waveguide; Additives; Frequency measurement; Gold; Loss measurement; Optical device fabrication; Rectangular waveguides; Resists; Silicon; Surface waves; Wavelength measurement; Micromachining; rectangular waveguides; submillimeter wave technology;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2010.2049095
