Title :
Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells
Author :
Lu, Jiwu ; Kovalgin, Alexey Y. ; van der Werf, Karine H.M. ; Schropp, Ruud E.I. ; Schmitz, Jurriaan
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
fDate :
7/1/2011 12:00:00 AM
Abstract :
We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust”).
Keywords :
CMOS integrated circuits; amorphous semiconductors; elemental semiconductors; monolithic integrated circuits; silicon; solar cells; CMOS chip; comparable electronic performance; deep submicrometer complementary metal oxide semiconductor microchip; integrated energy harvesting; monolithic integration; photovoltaic cell; process technology; solar cells; wireless autonomous microsystem; CMOS integrated circuits; Glass; Photovoltaic cells; Rough surfaces; Surface roughness; Surface topography; Surface treatment; Above integrated circuit (IC); amorphous Si (a-Si); complementary metal–oxide–semiconductor (CMOS); energy harvesting; energy scavenging; monolithic integration; photovoltaic (PV) cells; solar cells; ubiquitous computing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2011.2143716
