Title :
Microbolometer terahertz focal plane array and camera with improved sensitivity at 0.5–0.6 THz
Author :
Oda, Naoki ; Kurashina, Seiji ; Miyoshi, Masaru ; Doi, Kohei ; Ishi, Tsutomu ; Sudou, Takayuki ; Morimoto, Takuya ; Goto, Hiromi ; Sasaki, T.
Author_Institution :
Radio Applic., Guidance & Electro-Opt. Div., NEC, Fuchu, Japan
Abstract :
Sensitivity of microbolometer Terahertz (THz) focal plane array (FPA) is improved by one order of magnitude at 0.5-0.6 THz, comparing with the previous THz-FPA. This is achieved by modifying an optical cavity structure in a pixel, such that the optical cavity length is extended by a factor of 4-5 than that of the previous structure. Minimum detectable powers (MDPs) per pixel are measured at 4.3, 2.5, 0.6 and 0.5 THz for the THz-FPAs (640×480, 320×240) with the modified structure and those (320×240) with the previous structure.
Keywords :
bolometers; cameras; focal planes; submillimetre wave imaging; terahertz wave imaging; camera; frequency 0.5 THz to 0.6 THz; microbolometer terahertz focal plane array; minimum detectable power; optical cavity structure; Arrays; Cameras; Optical imaging; Optical sensors; Quantum cascade lasers; Sensitivity;
Conference_Titel :
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on
Conference_Location :
Tucson, AZ
DOI :
10.1109/IRMMW-THz.2014.6956015
