Continuous YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// film deposition by optically controlled reactive thermal co-evaporation

Author

Utz, B. ; Rieder-Zecha, S. ; Kinder, H.

Author_Institution

Dept. of Phys. E10, Tech. Univ. Munchen, Germany

Volume

7

Issue

2

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

1181

Lastpage

1184

Abstract

We built a thermal co-evaporation system to deposit YBCO films on large areas in a continuous process which requires some basic modifications to the established standard co-evaporation setup. An optical rate control system based on atomic absorption spectroscopy has been developed to measure the individual metal fluxes, in addition the metal sources can be reloaded in-situ for long times. The performance of these new components is discussed and results of first YBCO films grown on small samples are shown.

Keywords

CVD coatings; atomic absorption spectroscopy; barium compounds; high-temperature superconductors; superconducting thin films; visible spectra; yttrium compounds; YBa/sub 2/Cu/sub 3/O/sub 7/; atomic absorption spectroscopy; continuous YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// film deposition; high temperature superconductor; individual metal fluxes; optical rate control system; optically controlled reactive thermal co-evaporation; Atom optics; Atomic layer deposition; Boats; Control systems; High temperature superconductors; Optical control; Optical films; Optical filters; Substrates; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.620706

Filename

620706