Title :
Large-area and double-sided pulsed laser deposition of Y-Ba-Cu-O thin films applied to HTSC microwave devices
Author :
Lorenz, M. ; Hochmuth, H. ; Natusch, D. ; Borner, H. ; Tharigen, T. ; Patrikarakos, D.G. ; Frey, J. ; Kreher, K. ; Senz, S. ; Kastner, G. ; Hesse, D. ; Steins, M. ; Schmitz, W.
Author_Institution :
Inst. fur Experimentalphys. II, Leipzig Univ., Germany
fDate :
6/1/1997 12:00:00 AM
Abstract :
Pulsed laser deposition (PLD) of YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films on both sides of 3-inch diameter sapphire wafers and LaAlO/sub 3/ (LAO) cylinder substrates, respectively, is a basic and flexible technique in order to optimize microwave bandpass filters for wireless communication systems. The large-area and double-side PLD technique allows homogeneous and reproducible YBCO deposition on both substrate sides with inductively measured critical current densities j/sub c/ of 3/spl times/10/sup 6/ to 5/spl times/10/sup 6/ A/cm/sup 2/ at 77 K with a YBCO thickness of 350 nm to 600 nm. Selected results of compositional, structural, electrical, and microwave characterization of the PLD-YBCO films are reported.
Keywords :
band-pass filters; barium compounds; critical current density (superconductivity); high-temperature superconductors; microwave filters; pulsed laser deposition; superconducting microwave devices; superconducting thin films; yttrium compounds; 350 to 600 nm; 77 K; HTSC microwave devices; YBa/sub 2/Cu/sub 3/O/sub 7-x/ film; YBa/sub 2/Cu/sub 3/O/sub 7/; critical current densities; double-sided pulsed laser deposition; high temperature superconductor; large-area pulsed laser deposition; microwave bandpass filters; wireless communication systems; Band pass filters; Current measurement; Density measurement; Microwave theory and techniques; Optical pulses; Pulsed laser deposition; Sputtering; Thickness measurement; Wireless communication; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
