Title :
Surface recombination of ions and cratering by ion impact
Author :
Emeleus, K.G. ; Coulter, J.R.M.
Author_Institution :
Sch. of Phys. & Math. Sci., Queen´´s Univ. of Belfast, UK
fDate :
1/1/1988 12:00:00 AM
Abstract :
A critical resume is given of the present state of knowledge about recombination of ions and electrons, mainly on a glass or quartz surface exposed to a low-pressure plasma, and of the cratering of the surface by the impacting positive ions. Suggestions are made for future work, and the existence of some scaling relations for the recombination coefficient noted
Keywords :
glass; ion recombination; ion-surface impact; plasma-wall interactions; positive column; quartz; SiO2; cratering; glass; low-pressure plasma; positive column; positive ions; quartz surface; recombination of ions;
Journal_Title :
Physical Science, Measurement and Instrumentation, Management and Education - Reviews, IEE Proceedings A
