DocumentCode
1526883
Title
Surface recombination of ions and cratering by ion impact
Author
Emeleus, K.G. ; Coulter, J.R.M.
Author_Institution
Sch. of Phys. & Math. Sci., Queen´´s Univ. of Belfast, UK
Volume
135
Issue
1
fYear
1988
fDate
1/1/1988 12:00:00 AM
Firstpage
76
Lastpage
78
Abstract
A critical resume is given of the present state of knowledge about recombination of ions and electrons, mainly on a glass or quartz surface exposed to a low-pressure plasma, and of the cratering of the surface by the impacting positive ions. Suggestions are made for future work, and the existence of some scaling relations for the recombination coefficient noted
Keywords
glass; ion recombination; ion-surface impact; plasma-wall interactions; positive column; quartz; SiO2; cratering; glass; low-pressure plasma; positive column; positive ions; quartz surface; recombination of ions;
fLanguage
English
Journal_Title
Physical Science, Measurement and Instrumentation, Management and Education - Reviews, IEE Proceedings A
Publisher
iet
ISSN
0143-702X
Type
jour
Filename
6208
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