Design, fabrication and characterization of 585 GHz integrated focal-plane arrays based on heterostructure backward diodes

We report the design, fabrication and characterization results of 585 GHz focal-plane arrays (FPAs) using Sb-based heterostructure backward diodes (Sb-HBDs) integrated with lens-coupled folded-dipole antennas (LC-FDAs). Under impedance matching condition, a responsivity of 9,800 V/W at 585 GHz for a single array element detector can be achieved based on simulation results. In order to expand the single element into two-dimensional (2D) FPAs, the off-axis radiation patterns of the FDA array, as well as the mutual coupling between adjacent elements have been analyzed. The designed 2D arrays have been fabricated and characterization results are presented.