Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses

Author

Viens, Jean-Francois ; Meneghini, Chiara ; Villeneuve, Alain ; Galstian, Tigran V. ; Knystautas, Émile J. ; Duguay, M.A. ; Richardson, K.A. ; Cardinal, T.

Author_Institution

Center for Opt., Laval Univ., Que., Canada

Volume

17

Issue

7

fYear

1999

fDate

7/1/1999 12:00:00 AM

Firstpage

1184

Lastpage

1191

Abstract

This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case

Keywords

arsenic compounds; chalcogenide glasses; integrated optics; ion implantation; laser beam applications; optical fabrication; optical glass; optical waveguides; photolithography; As-S-Se-based chalcogenide glass optical waveguide fabrication; bulk sulfide glasses; fabrication process; integrated devices; integrated optical waveguides; ion implantation; laser beam writing; optical losses; photolithography; propagation characteristics; sulfide chalcogenide glasses; Glass; Integrated optics; Ion beams; Laser beams; Lithography; Optical device fabrication; Optical waveguides; Particle beam optics; Waveguide lasers; Writing;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.774252

Filename

774252