DocumentCode :
1527580
Title :
Diffusion modeling of an HF argon plasma discharge in a magnetic field
Author :
Vidal, François ; Johnston, Tudor Wyatt ; Margot, Joëlle ; Chaker, Mohamed ; Pauna, Olivier
Author_Institution :
INRS, Montreal, Que., Canada
Volume :
27
Issue :
3
fYear :
1999
fDate :
6/1/1999 12:00:00 AM
Firstpage :
727
Lastpage :
745
Abstract :
Using the basic moment equations (number density, flow density, and energy density) for singly ionized argon and for electrons, a simple diffusion equation (essentially one proposed by Lieberman and Lichtenberg, 1994) is adopted (by comparison with experiment), together with an integrated power balance equation. The effects of scaling magnetic field and radius are then discussed first for simple cylinders, for which there are known analytic diffusion solutions. For specific cases having the more complicated geometry of two abutting coaxial cylinders with considerably different radii, the numerical results are well approximated and delimited by considering only the wider cylinder for low magnetic field, and at high magnetic field, where end effects dominate, using the total length and the smallest diameter of the system
Keywords :
argon; diffusion; high-frequency discharges; plasma transport processes; Ar; HF argon plasma discharge; abutting coaxial cylinders; analytic diffusion solutions; basic moment equations; diameter; diffusion modeling; energy density; flow density; high magnetic field; integrated power balance equation; low magnetic field; magnetic radius; number density; scaling magnetic field; simple cylinders; total length; Argon; Electrons; Fault location; Geometry; Hafnium; Inductors; Magnetic fields; Plasma applications; Plasma density; Plasma sources;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.774677
Filename :
774677
Link To Document :
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