• DocumentCode
    1527864
  • Title

    Fabrication of Freestanding SiO _{2} -Membrane Systems for Thermo-Optic Adjusting of SOI Photonic Wires

  • Author

    Amthor, Julia ; Horn, Oliver ; Lipka, Timo ; Savov, Angel ; Müller, Jörg

  • Author_Institution
    Inst. of Micro Syst. Technol. (E-7), Hamburg Univ. of Technol., Hamburg, Germany
  • Volume
    23
  • Issue
    16
  • fYear
    2011
  • Firstpage
    1142
  • Lastpage
    1144
  • Abstract
    This work describes the design and fabrication of an electrostatically deflectable SiO2-membrane system with low-loss silicon-on-insulator (SOI) photonic wires. The photonic wires have been tuned thermo-optically and elasto-optically. A 10-mW thermo-optic switch is presented.
  • Keywords
    integrated optics; membranes; optical design techniques; optical fabrication; optical losses; optical switches; optical tuning; photoelasticity; silicon compounds; silicon-on-insulator; thermo-optical devices; SOI photonic wires; Si; SiO2; elasto-optical tuning; electrostatically deflectable-membrane system; freestanding-membrane systems; low-loss silicon-on-insulator photonic wires; power 10 mW; thermo-optic switch; thermo-optical tuning; Fabrication; Photonics; Resists; Silicon; Substrates; Tuning; Wires; Cantilever; elasto-optic; photonic wire; silicon-on-insulator (SOI); thermo-optic;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2011.2157909
  • Filename
    5776656
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1527864