Title :
Surface morphology, microstructure and electrical properties of Y-Ba-Cu-O thin films
Author :
Drozdov, Y.N. ; Gaponov, S.V. ; Gusev, S.A. ; Kluenkov, E.B. ; Nozdrin, Y.N. ; Talanov, V.V. ; Vorobiev, A.K.
Author_Institution :
Inst. of Phys. of Microstruct., Acad. of Sci., Nizhny Novgorod, Russia
fDate :
6/1/1997 12:00:00 AM
Abstract :
The relationship between the surface morphology, the microstructure and the electrical properties of "in situ" YBCO thin films deposited by off- axis magnetron sputtering has been investigated in a wide range of deposition temperatures, deposition rate and pressure of gas mixtures. The Cu-rich surface particles formation observed in our experiment can be described using a classical thin film nucleation and growth model based on the concept of capture zones. The films with optimized electrical properties show high critical temperatures, T/sub C/, up to 92 K and high critical current densities, J/sub C/, up to 7/spl middot/10/sup 6/ A/cm/sup 2/ and surface microwave resistance, R/sub S/, less than 0.6 mOhm (at 10 GHz) at 77 K. The films with optimized surface smoothness show T/sub C/ up to 89 K, J/sub C/ up to 2/spl middot/10/sup 6/ A/cm/sup 2/ and they are free of any particles down to a size scale of 100 /spl Aring/.
Keywords :
barium compounds; critical current density (superconductivity); crystal microstructure; high-temperature superconductors; sputtered coatings; superconducting thin films; superconducting transition temperature; surface conductivity; surface topography; yttrium compounds; 100 A; 92 K; Y-Ba-Cu-O; Y-Ba-Cu-O thin films; capture zones; classical thin film nucleation and growth model; deposition rate; deposition temperatures; electrical properties; high critical current densities; high critical temperatures; high temperature superconductor; magnetron sputtering; microstructure; surface microwave resistance; surface morphology; Critical current density; Microstructure; Sputtering; Substrates; Superconducting films; Surface emitting lasers; Surface morphology; Surface resistance; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
