DocumentCode
1528362
Title
Analysis of 3-D vibrations of rectangular AT-cut quartz plates with a bi-mesa structure
Author
Sekimoto, Hitoshi ; Goka, Shigeyoshi ; Watanabe, Yasuaki
Author_Institution
Dept. of Electr. Eng., Tokyo Metropolitan Univ., Japan
Volume
48
Issue
5
fYear
2001
Firstpage
1302
Lastpage
1307
Abstract
A method to analyze 3-D vibrations of rectangular AT-cut quartz, bi-mesa-shaped plates is developed. The method is based on a classical approach. As in 2-D analysis, the half structure of a plate is separated into a thick bi-mesa and a thin-side portion, and the displacement field of each region is represented by a linear combination of guided waves. In the 3-D analysis, we apply the 2-D finite element method (FEM) to obtain the waves guided by two pairs of parallel surfaces. The orthogonal property of guided modes is incorporated to approximately fulfil the continuity conditions at the interface between the thick and thin portions. The stress-free conditions on the plate edges are satisfied by employing the method of weighted residuals (MWR). The computational advantage of this method is that it can greatly reduce the matrix size compared with the 3-D FEM. As a numerical example, the frequency spectra are calculated for X-elongated plates of bi-mesa shape, and the strong energy-trapping effect on the fundamental thickness-shear (TS) resonance is verified.
Keywords
crystal resonators; finite element analysis; mode matching; 2D finite element method; 3D vibrations; SiO/sub 2/; X-elongated plates; bi-mesa structure; continuity conditions; displacement field; frequency spectra; fundamental thickness-shear resonance; matrix size; method of weighted residuals; orthogonal property; parallel surfaces; rectangular AT-cut quartz plates; stress-free conditions; strong energy-trapping effect; Boundary conditions; Electrodes; Equations; Finite element methods; Performance analysis; Resonance; Resonant frequency; Shape; Strips; Surface waves;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.949739
Filename
949739
Link To Document