A practical implementation of millimeter and submillimeter wave length on-wafer S-parameter calibration

We present an approach for two-port on-wafer calibration to establish the test reference planes within the substrate of the device under test for the WR3 (220-325 GHz) and WR5 (140-220 GHz) frequency bands. On-wafer calibration is useful for characterizing elements such as transistors for modeling or for the confirmation of circuit models. There are numerous publications for on-wafer calibrations, this discussion differs in that we will present our on-wafer calibration approach with comparison of measurements and simulations of passive structures and that of a transistor model constructed from lower frequency measurements. We discuss practical considerations for the approach we have utilized for high frequency characterization.