Title :
Particle composition of high-pressure SF6 plasma with electron temperature greater than gas temperature
Author :
Tanaka, Yasunori ; Yokomizu, Yasunobu ; Ishikawa, Motohiro ; Matsumura, Toshiro
Author_Institution :
Dept. of Electr. Eng., Nagoya Univ., Japan
fDate :
10/1/1997 12:00:00 AM
Abstract :
Numerical computation was performed to derive particle compositions of high-pressure SF6 plasmas in which the electron temperature Te is greater than the gas temperature T g. The effective excitation temperature Tex for each of particles was proposed to express the distribution of particles in excited states. Furthermore, the relation equations for chemical equilibrium in a two-temperature plasma were developed on the basis of the second law of thermodynamics. At fixed Tg in the range of 6000-9000 K, the increasing Te from 9000-20 000 K encourages the dissociation and ionization of particles, causing the composition of SF6 plasma at 0.1 MPa to differ markedly from the composition under the condition of thermal equilibrium
Keywords :
arcs (electric); chemical equilibrium; dissociation; excited states; ionisation; plasma collision processes; plasma density; plasma temperature; plasma thermodynamics; sulphur compounds; 0.1 MPa; 6000 to 9000 K; 9000 to 20000 K; SF6; SF6 plasma; chemical equilibrium; dissociation; effective excitation temperature; electron temperature; gas temperature; high-pressure plasma; ionization; particle compositions; particle distribution; relation equations; second law of thermodynamics; thermal equilibrium conditions; two-temperature plasma; Chemicals; Electrons; Energy states; Equations; Plasma chemistry; Plasma temperature; Sulfur hexafluoride; Tellurium; Temperature distribution; Thermodynamics;
Journal_Title :
Plasma Science, IEEE Transactions on
