Title :
Experimental investigation of atmospheric pressure nonequilibrium plasma chemistry
Author :
Kruger, Charles H. ; Owano, Thomas G. ; Laux, Christophe O.
Author_Institution :
Div. of Thermosci., Stanford Univ., CA, USA
fDate :
10/1/1997 12:00:00 AM
Abstract :
Atmospheric pressure plasmas are frequently considered to be in local thermodynamic equilibrium due to the high frequency of collisional processes which drive the plasma state toward a Maxwell-Boltzmann equilibrium. However, various forms of thermodynamic, ionizational, and chemical nonequilibrium have been demonstrated and investigated in atmospheric pressure plasma environments over the last several years, and the nonequilibrium behaviour of such systems can be quite significant. The investigation, understanding, and exploitation of atmospheric pressure nonequilibrium plasma chemistry is necessary to the further expansion of plasma-based systems into mainstream manufacturing and processing applications. Several experimental programs to investigate the fundamental processes of atmospheric pressure nonequilibrium plasma chemistry and the application of this nonequilibrium to various chemical systems have been undertaken in our laboratories, The results of these investigations have shed light on the kinetics behind various forms of atmospheric pressure nonequilibrium chemistry, and have provided insights into the beneficial control of nonequilibrium plasma chemistry for processing applications
Keywords :
arcs (electric); chemical reactions; chemistry; plasma CVD; plasma applications; plasma collision processes; plasma diagnostics; plasma flow; plasma jets; plasma thermodynamics; plasma torches; Maxwell-Boltzmann equilibrium; atmospheric pressure nonequilibrium plasma chemistry; atmospheric pressure plasmas; chemical nonequilibrium; chemical systems; collisional processes; high-enthalpy direct-current arcjet; kinetics; local thermodynamic equilibrium; manufacturing applications; nonequilibrium behaviour; nonequilibrium plasma chemistry; plasma state; plasma-based systems; processing applications; radio-frequency plasma torch; Atmospheric-pressure plasmas; Chemical processes; Frequency; Kinetic theory; Laboratories; Manufacturing processes; Plasma applications; Plasma chemistry; Plasma materials processing; Thermodynamics;
Journal_Title :
Plasma Science, IEEE Transactions on