DocumentCode
1528731
Title
An efficient Monte Carlo simulator for low-pressure RF plasmas
Author
Ardehali, Mohammad ; Matsumoto, Hiroshi
Author_Institution
Microelectron. Res. Labs., NEC Corp., Sagamihara, Japan
Volume
25
Issue
5
fYear
1997
fDate
10/1/1997 12:00:00 AM
Firstpage
1081
Lastpage
1085
Abstract
An efficient, self-consistent particle-in-cell/Monte Carlo (PIC/MC) plasma simulator has been developed. The simulator features an effective method to increase the number of MC particles belonging to the sheath by splitting the particles and by adjusting their statistical weight. This splitting technique leads to substantial reduction of statistical noise within the sheath. The simulator has been used to model a radio frequency (RF) plasma at a pressure of 20 mTorr. The results of this simulator are compared with the results of the standard PIC/MC simulator
Keywords
Monte Carlo methods; plasma; plasma simulation; 20 mtorr; Monte Carlo particles; low-pressure RF plasmas; self-consistent particle-in-cell/Monte Carlo plasma simulator; sheath; splitting technique; statistical noise; statistical weight; Circuit simulation; Distribution functions; Electrodes; Electrons; Monte Carlo methods; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency; Sampling methods;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.649629
Filename
649629
Link To Document