Title :
An efficient Monte Carlo simulator for low-pressure RF plasmas
Author :
Ardehali, Mohammad ; Matsumoto, Hiroshi
Author_Institution :
Microelectron. Res. Labs., NEC Corp., Sagamihara, Japan
fDate :
10/1/1997 12:00:00 AM
Abstract :
An efficient, self-consistent particle-in-cell/Monte Carlo (PIC/MC) plasma simulator has been developed. The simulator features an effective method to increase the number of MC particles belonging to the sheath by splitting the particles and by adjusting their statistical weight. This splitting technique leads to substantial reduction of statistical noise within the sheath. The simulator has been used to model a radio frequency (RF) plasma at a pressure of 20 mTorr. The results of this simulator are compared with the results of the standard PIC/MC simulator
Keywords :
Monte Carlo methods; plasma; plasma simulation; 20 mtorr; Monte Carlo particles; low-pressure RF plasmas; self-consistent particle-in-cell/Monte Carlo plasma simulator; sheath; splitting technique; statistical noise; statistical weight; Circuit simulation; Distribution functions; Electrodes; Electrons; Monte Carlo methods; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency; Sampling methods;
Journal_Title :
Plasma Science, IEEE Transactions on
