• DocumentCode
    1528961
  • Title

    High Performance and Stability of Double-Gate Hf–In–Zn–O Thin-Film Transistors Under Illumination

  • Author

    Park, Joon Seok ; Son, Kyoung Seok ; Kim, Tae Sang ; Jung, Ji Sim ; Lee, Kwang-Hee ; Maeng, Wan-Joo ; Kim, Hyun-Suk ; Kim, Eok Su ; Park, Kyung-Bae ; Seon, Jong-Baek ; Kwon, Jang-Yeon ; Ryu, Myung Kwan ; Lee, Sangyun

  • Author_Institution
    Display Lab., Samsung Adv. Inst. of Technol., Yongin, South Korea
  • Volume
    31
  • Issue
    9
  • fYear
    2010
  • Firstpage
    960
  • Lastpage
    962
  • Abstract
    Hafnium indium zinc oxide thin-film transistors (TFTs) with a double-gate structure were evaluated for the first time. Compared with devices with a single bottom gate, TFTs with an additional top gate exhibit improved subthreshold swing, threshold voltage, and field-effect mobility, as well as smaller subthreshold currents upon exposure to visible light. This phenomenon is attributed to the more effective suppression of excess photocurrents by the application of a double-gate structure. Negative-bias stress experiments under illumination indicate that the double-gate TFT exhibits very high stability compared with the device with a single-gate configuration.
  • Keywords
    thin film transistors; Hf-In-Zn-O; double-gate structure; double-gate thin film transistors; excess photocurrents; field-effect mobility; high performance; illumination; single-gate configuration; stability; Hafnium; Indium; Lighting; Photoconductivity; Stability; Stress; Subthreshold current; Thin film transistors; Threshold voltage; Zinc oxide; Double gate; hafnium indium zinc oxide (HIZO); thin-film transistor (TFT);
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2010.2051407
  • Filename
    5503991