DocumentCode :
1529330
Title :
All-metal high-isolation series and series/shunt MEMS switches
Author :
Muldavin, Jeremy B. ; Rebeiz, Gabriel M.
Author_Institution :
Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA
Volume :
11
Issue :
9
fYear :
2001
Firstpage :
373
Lastpage :
375
Abstract :
This paper presents a novel all-metal series switch with several different pull-down electrode geometries. The switch results in an up-state capacitance of 5-9 fF and an isolation of -25 to -30 d8 at 10 GHz. The fabrication process is completely compatible with the standard capacitive (or dc-contact) shunt switch, A dc-30 GHz series/shunt switch is also presented with an isolation of -60 dB at 5 GHz and -42 dB at 10 GHz. This is the highest isolation switch available to-date. The performance is limited by radiation in the CPW lines and not by the series/shunt switch characteristics. The application areas are in high-isolation switches for basestations and satellite systems.
Keywords :
micromechanical devices; microwave switches; 10 GHz; 5 GHz; 5 to 9 fF; CPW line; DC contact; K-band; X-band; all-metal MEMS switch; base station; capacitance; fabrication process; isolation; pull-down electrode; satellite system; series switch; series/shunt switch; Bridge circuits; Capacitance; Contacts; Electrodes; Fabrication; Geometry; Micromechanical devices; Microswitches; Structural beams; Switches;
fLanguage :
English
Journal_Title :
Microwave and Wireless Components Letters, IEEE
Publisher :
ieee
ISSN :
1531-1309
Type :
jour
DOI :
10.1109/7260.950765
Filename :
950765
Link To Document :
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