All-metal high-isolation series and series/shunt MEMS switches

Author

Muldavin, Jeremy B. ; Rebeiz, Gabriel M.

Author_Institution

Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA

Volume

11

Issue

9

fYear

2001

Firstpage

373

Lastpage

375

Abstract

This paper presents a novel all-metal series switch with several different pull-down electrode geometries. The switch results in an up-state capacitance of 5-9 fF and an isolation of -25 to -30 d8 at 10 GHz. The fabrication process is completely compatible with the standard capacitive (or dc-contact) shunt switch, A dc-30 GHz series/shunt switch is also presented with an isolation of -60 dB at 5 GHz and -42 dB at 10 GHz. This is the highest isolation switch available to-date. The performance is limited by radiation in the CPW lines and not by the series/shunt switch characteristics. The application areas are in high-isolation switches for basestations and satellite systems.

Keywords

micromechanical devices; microwave switches; 10 GHz; 5 GHz; 5 to 9 fF; CPW line; DC contact; K-band; X-band; all-metal MEMS switch; base station; capacitance; fabrication process; isolation; pull-down electrode; satellite system; series switch; series/shunt switch; Bridge circuits; Capacitance; Contacts; Electrodes; Fabrication; Geometry; Micromechanical devices; Microswitches; Structural beams; Switches;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/7260.950765

Filename

950765