Title :
An improved multi-layer fabrication process for YBa/sub 2/Cu/sub 3/O/sub 7-x/-based circuits
Author :
Li, H.Q. ; Ono, R.H. ; Vale, L.R. ; Rudman, D.A. ; Liou, S.H. ; Mallison, W.H.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
fDate :
6/1/1997 12:00:00 AM
Abstract :
Improved via connections in structures of YBa/sub 2/Cu/sub 3/O/sub 7-x//SrTiO/sub 3//YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO/STO/YBCO) multilayers have been made using a combined HF wet-etching and ion-milling process. The critical current density J/sub c/ of the via is as high as 2/spl times/10/sup 6/ A/cm/sup 2/ at 76 K, and is dominated by edge contacts in the ab-plane, YBCO and Sr/sub 2/AlNbO/sub 6/ (SAN) multilayer test circuits were also made with this process. The 4/spl deg/ crossovers in a SAN test chip had a critical temperature T/sub c/ of 88 K and J/sub c/ of 1.5/spl times/10/sup 6/ A/cm/sup 2/ at 81 K, very close to those of the planar film, showing no evidence of weak links in the YBCO crossing low angle SAN steps.
Keywords :
barium compounds; critical current density (superconductivity); etching; high-temperature superconductors; ion beam effects; strontium compounds; superconducting thin films; yttrium compounds; 76 K; 88 K; HF wet-etching; YBa/sub 2/Cu/sub 3/O/sub 7-x/-based circuits; YBa/sub 2/Cu/sub 3/O/sub 7-x//SrTiO/sub 3//YBa/sub 2/Cu/sub 3/O/sub 7-x/; YBa/sub 2/Cu/sub 3/O/sub 7/-SrTiO/sub 3/; critical current density; edge contacts; high temperature superconductor; ion-milling process; multi-layer fabrication process; planar film; via connections; weak links; Circuit testing; Critical current density; Etching; Fabrication; Hafnium; High temperature superconductors; Nonhomogeneous media; Resists; Storage area networks; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
