Title :
On-axis sputter deposition of Sr/sub 2/AlTaO/sub 6/ dielectric thin films for multilayer Y-Ba-Cu-O circuits
Author :
Hu, R. ; Murduck, J.M. ; Pettiette-Hall, C.L. ; Daly, K.P.
Author_Institution :
TRW Inc., Redondo Beach, CA, USA
fDate :
6/1/1997 12:00:00 AM
Abstract :
Sr/sub 2/AITaO/sub 6/(SAT) is a desirable dielectric for use in YBCO multilayer circuits due to the close lattice match to YBa/sub 2/Cu/sub 3/O/sub 7/(YBCO), and low dielectric constant, SAT thin films have been deposited using on axis rf magnetron sputtering. Epitaxial growth of SAT has been measured using x-ray diffraction. The electrical isolation of SAT sandwiched between two YBCO layers, and the superconducting critical current of YBCO deposited over SAT crossover structures are measured.
Keywords :
X-ray diffraction; aluminium compounds; barium compounds; dielectric thin films; high-temperature superconductors; sputtered coatings; strontium compounds; superconducting epitaxial layers; yttrium compounds; Sr/sub 2/AlTaO/sub 6/; Sr/sub 2/AlTaO/sub 6/ dielectric thin films; YBa/sub 2/Cu/sub 3/O/sub 7/; close lattice match; electrical isolation; epitaxial growth; high temperature superconductor; low dielectric constant; multilayer Y-Ba-Cu-O circuits; on axis rf magnetron sputtering; on-axis sputter deposition; superconducting critical current; Dielectric constant; Dielectric measurements; Dielectric thin films; Lattices; Magnetic circuits; Magnetic multilayers; Sputtering; Strontium; Superconducting thin films; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
