DocumentCode
1529774
Title
Sensitivity Features of Thin Film Plate Acoustic Wave Resonators
Author
Arapan, Lilia ; Anderås, Emil ; Katardjiev, Ilia ; Yantchev, Ventsislav
Author_Institution
Dept. of Solid State Electron., Uppsala Univ., Uppsala, Sweden
Volume
11
Issue
12
fYear
2011
Firstpage
3330
Lastpage
3331
Abstract
Thin film plate acoustic resonators devices operating in the lowest order symmetric Lamb wave mode (S0) in c-oriented aluminum nitride (AlN) membranes on Si were fabricated and tested for their sensitivities to pressure and mass as well as for their ability to work in liquid environment.
Keywords
acoustic resonators; silicon; thin film devices; AlN; C-oriented aluminum nitride membranes; Si; liquid environment; lowest order symmetric Lamb wave mode; pressure sensitivity; sensitivity features; thin film plate acoustic wave resonators; Film bulk acoustic resonators; Resonant frequency; Resonators; Sensitivity; Surface acoustic waves; AlN; micro-acoustic; resonator; sensitivity;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2011.2158094
Filename
5779692
Link To Document