Title :
Sensitivity Features of Thin Film Plate Acoustic Wave Resonators
Author :
Arapan, Lilia ; Anderås, Emil ; Katardjiev, Ilia ; Yantchev, Ventsislav
Author_Institution :
Dept. of Solid State Electron., Uppsala Univ., Uppsala, Sweden
Abstract :
Thin film plate acoustic resonators devices operating in the lowest order symmetric Lamb wave mode (S0) in c-oriented aluminum nitride (AlN) membranes on Si were fabricated and tested for their sensitivities to pressure and mass as well as for their ability to work in liquid environment.
Keywords :
acoustic resonators; silicon; thin film devices; AlN; C-oriented aluminum nitride membranes; Si; liquid environment; lowest order symmetric Lamb wave mode; pressure sensitivity; sensitivity features; thin film plate acoustic wave resonators; Film bulk acoustic resonators; Resonant frequency; Resonators; Sensitivity; Surface acoustic waves; AlN; micro-acoustic; resonator; sensitivity;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2011.2158094
