DocumentCode
1529811
Title
Vertical resonant couplers with precise coupling efficiency control fabricated by wafer bonding
Author
Tishinin, D.V. ; Dapkus, P.D. ; Bond, A.E. ; Kim, I. ; Lin, C.K. ; O´Brien, J.
Author_Institution
Dept. of Electr. Eng., Univ. of Southern California, Los Angeles, CA, USA
Volume
11
Issue
8
fYear
1999
Firstpage
1003
Lastpage
1005
Abstract
A fabrication technique to create complex three-dimensional waveguide devices is effected by using wafer bonding to process two sides of an epitaxial structure. Vertical resonant couplers with precise control over coupling efficiency are demonstrated.
Keywords
epitaxial growth; integrated optics; integrated optoelectronics; optical directional couplers; optical fabrication; optical waveguides; wafer bonding; 3D optical waveguide devices; complex three-dimensional waveguide devices; coupling efficiency; epitaxial structure; optical fabrication; precise coupling efficiency control; vertical resonant couplers; wafer bonding; Coupling circuits; Epitaxial growth; Optical fiber couplers; Optical resonators; Optical waveguides; Planar waveguides; Resonance; Semiconductor waveguides; Wafer bonding; Wavelength division multiplexing;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.775327
Filename
775327
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