• DocumentCode
    153017
  • Title

    Optimization of design and microfabrication of metamaterial-based absorber for terahertz microbolometer

  • Author

    Oulachgar, H. ; Paultre, J.-E. ; Provencal, F. ; D´Amato, D. ; Beaupre, P. ; Alain, C. ; Jerominek, H.

  • Author_Institution
    Inst. Nat. d´Opt. (INO), Quebec City, QC, Canada
  • fYear
    2014
  • fDate
    14-19 Sept. 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The sensitivity of uncooled microbolometer detectors to terahertz radiation can be significantly improved by enhancing the platform absorption. This paper presents the various aspects of design and optimization of metamaterial based frequency selective terahertz absorber. It also briefly discusses the microfabrication of terahertz microbolometer focal plane array which was recently developed at INO.
  • Keywords
    metamaterials; microfabrication; optimisation; frequency selective terahertz absorber; metamaterial based absorber; microbolometer detectors; microfabrication design optimisation; platform absorption; terahertz microbolometer; terahertz microbolometer focal plane array; Absorption; Arrays; Detectors; Microfabrication; Microstructure; Periodic structures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on
  • Conference_Location
    Tucson, AZ
  • Type

    conf

  • DOI
    10.1109/IRMMW-THz.2014.6956211
  • Filename
    6956211
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=153017