Title :
Field and temperature-dependent thin film characterization with a continuous-wave terahertz magneto-spectrometer
Author :
Daughton, D.R. ; Higgins, R. ; Yano, Sumio
Author_Institution :
Lake Shore Cryotronics, Westerville, OH, USA
Abstract :
We report on a non-contact, non-destructive evaluation system which utilizes frequency-domain THz transmission spectroscopy to examine the temperature and magnetic field-dependent conductivity of thin film on substrate materials.
Keywords :
magneto-optical devices; terahertz materials; terahertz spectroscopy; thin films; continuous-wave terahertz magneto-spectrometer; frequency-domain THz transmission spectroscopy; noncontact evaluation system; nondestructive evaluation system; temperature-dependent thin film; Conductivity; Films; Semiconductor device measurement; Substrates; Temperature measurement; Thickness measurement;
Conference_Titel :
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2014 39th International Conference on
Conference_Location :
Tucson, AZ
DOI :
10.1109/IRMMW-THz.2014.6956227
