DocumentCode
1530576
Title
Forward to the Special Section on “Materials, Processing, and Reliability of 3-D Interconnects”
Author
Ho, Paul S. ; Smith, Lee ; Tong, Ho-Ming ; Zschech, E.
Author_Institution
Microelectronics Research Center, The University of Texas at Austin, Austin, USA
Volume
12
Issue
2
fYear
2012
fDate
6/1/2012 12:00:00 AM
Firstpage
188
Lastpage
188
Abstract
The 13 papers in this special section focus on materials, processing, and reliability of 3-D interconnects.
Keywords
Integrated circuit interconnections; Special issues and sections;
fLanguage
English
Journal_Title
Device and Materials Reliability, IEEE Transactions on
Publisher
ieee
ISSN
1530-4388
Type
jour
DOI
10.1109/TDMR.2012.2194830
Filename
6210445
Link To Document