Properties of tetrahedral amorphous carbon film by filtered cathodic arc deposition for disk overcoat

Author

Hyodo, Hiroyuki ; Yamamoto, Takayuki ; Toyoguchi, Takashi

Author_Institution

Lab. of Magnetic Recording Technol., Fujitsu Labs. Ltd., Atsugi, Japan

Volume

37

Issue

4

fYear

2001

fDate

7/1/2001 12:00:00 AM

Firstpage

1789

Lastpage

1791

Abstract

Properties of an amorphous carbon film by filtered cathodic arc (FCA) deposition were studied. It was found that the properties of the film hardly changed by deposition conditions and that nitrogen doping into the film was effective for controlling the film properties. The amount of the sp³ bonding in the film was decreased with nitrogen content, thus the hardness also decreased. The adhesion of lubricant to the carbon film was improved by nitrogen doping. The films by FCA deposition have high durability and can be expected as ultra thin disk overcoat for the next generation

Keywords

carbon; corrosion protective coatings; hardness; lubrication; magnetic disc storage; sputter deposition; C; FCA deposition; deposition conditions; disk overcoat; durability; filtered cathodic arc; hardness; lubricant; sp³ bonding; ultra thin disk overcoat; Amorphous materials; Bonding; Cathodes; Doping; Lubricants; Magnetic films; Magnetic separation; Nitrogen; Spectroscopy; Substrates;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.950969

Filename

950969