Title :
Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna
Author :
Wang, Yi ; Ke, Maolong ; Lancaster, Michael J. ; Chen, Jian
Author_Institution :
Sch. of Electr., Electron. & Comput. Eng., Univ. of Birmingham, Birmingham, UK
fDate :
7/3/1905 12:00:00 AM
Abstract :
A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.
Keywords :
antenna radiation patterns; micromachining; millimetre wave antennas; resists; slot antennas; waveguide discontinuities; H-plane matched right-angle bend; equal layer thickness; four-layer structure; frequency 300 GHz; metal-coated SU-8 thick resist; micromachined SU-8-based slotted waveguide antenna; radiation patterns; standard waveguide flange; Antenna measurements; Antenna radiation patterns; Fabrication; Flanges; Silver; Slot antennas; Micromachining; millimeter-wave waveguides; slot arrays; waveguide bends;
Journal_Title :
Antennas and Wireless Propagation Letters, IEEE
DOI :
10.1109/LAWP.2011.2158285
