DocumentCode
1531116
Title
Uncooled bimaterial cantilever for infrared detection based on resonant frequency tracking
Author
Zhao Danqi ; Zhang Xia ; Liu Peng ; Yang Fang ; Zhang DaCheng
Author_Institution
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Volume
7
Issue
5
fYear
2012
fDate
5/1/2012 12:00:00 AM
Firstpage
434
Lastpage
438
Abstract
A novel method of detecting infrared (IR) radiation by tracking resonant frequency of bimaterial resonant sensors is presented. A capacitive bimaterial resonant sensor (BRS) array consisting of 6×6 cells is fabricated by surface sacrificial layer process. The BRSs are packaged and tested not only by optical but also by electrical method. The results indicate that the BRSs exhibit a monotonic frequency response, which is in correspondence with the theoretical prediction by finite element method. The resonant frequency responsivity of the BRS is better than 363×Hz×K by electrical measurement.
Keywords
cantilevers; finite element analysis; infrared detectors; BRS array; capacitive bimaterial resonant sensor; finite element method; infrared detection; monotonic frequency response; resonant frequency tracking; surface sacrificial layer process; uncooled bimaterial cantilever;
fLanguage
English
Journal_Title
Micro & Nano Letters, IET
Publisher
iet
ISSN
1750-0443
Type
jour
DOI
10.1049/mnl.2012.0144
Filename
6210972
Link To Document