DocumentCode :
1531183
Title :
Sem irradiation for hardness assurance screening and process definition
Author :
Cohen, Seymour
Volume :
21
Issue :
6
fYear :
1974
Firstpage :
387
Lastpage :
389
Abstract :
Low-energy electron irradiation of complementary metal-oxide semiconductor (CMOS) devices has been correlated to cobalt-60 gamma irradiation in terms of oxide space charges and interface states.1 This paper reports on the results obtained using the low-energy electron beam of a standard commercial scanning-electron-microscope (SEM) for in-process hardness assurance screening and as a tool for rapid evaluation of process variations designed to improve total-dose radiation hardness. The techniques for SEM testing are described, and the results of correlation studies of radiation effects produced by the SEM, gamma radiation (Co-60), and 106-eV sources compared. The variance in total dose radiation hardness over a single wafer and from wafer to wafer has been investigated for the CMOS CD-4007 array and the results are reported.
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1974.6498958
Filename :
6498958
Link To Document :
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