DocumentCode :
1531321
Title :
MR measurement of sub-micron scale relief structures fabricated in GMR materials
Author :
Matsuyama, K. ; Nozaki, Y. ; Misumi, T.
Author_Institution :
Dept. of Electron. Device Eng., Kyushu Univ., Fukuoka, Japan
Volume :
37
Issue :
4
fYear :
2001
fDate :
7/1/2001 12:00:00 AM
Firstpage :
2114
Lastpage :
2116
Abstract :
Understanding of magnetization process in patterned thin films is important for their applications in downsizing various magnetic devices. This paper deals with an experimental technique which enables us to characterize magnetization process in the ends of patterned ultra-thin films. In this study only the top layer of magnetic sandwich structures were patterned into an array of fine magnetic particles using electron beam lithography and Ar ion milling to form relief structures in the films. The magnetization process of the arrays was inferred from magnetoresistance (MR) measurements of the films. MR behaviors of particle array samples of substrate/FM1/Cu/FM2 (FM 1, FM2=Co, NiFe, CoPt) in different pattern widths of w=0.2 and 0.6 μm, lengths L ranging from 0.2 to 280 μm and thicknesses of t=6 and 18 nm were studied. From longitudinal MR measurements, a distinct decrease in remanent magnetization was found for sub-μm particle arrays, which may be associated with the Formation of edge domains in the particles
Keywords :
giant magnetoresistance; magnetic particles; magnetic switching; magnetic thin films; magnetisation; magnetisation reversal; Ar ion milling; GMR materials; electron beam lithography; fine magnetic particles; magnetic sandwich structures; magnetization process; patterned thin films; patterned ultra-thin films; sub-micron scale relief structures; Argon; Electron beams; Lithography; Magnetic devices; Magnetic films; Magnetic particles; Magnetization processes; Milling; Sandwich structures; Thin film devices;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.951070
Filename :
951070
Link To Document :
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